Invention Grant
- Patent Title: Method of growing III-nitride crystal
- Patent Title (中): 生长III族氮化物晶体的方法
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Application No.: US12630836Application Date: 2009-12-03
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Publication No.: US09279194B2Publication Date: 2016-03-08
- Inventor: Hiroaki Yoshida , Shinsuke Fujiwara , Koji Uematsu , Masanori Morishita
- Applicant: Hiroaki Yoshida , Shinsuke Fujiwara , Koji Uematsu , Masanori Morishita
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agent James W. Judge
- Priority: JP2008-309737 20081204
- Main IPC: C30B25/20
- IPC: C30B25/20 ; C30B29/40

Abstract:
Affords a method of growing, across the entirety of a major surface of a first III-nitride crystal, a second III-nitride crystal by HVPE, in an ambient temperature higher than 1100° C. The present III-nitride crystal growth method comprises: a step of preparing a first III-nitride crystal (10) having an alkali-metal atom concentration of less than 1.0×1018 cm−3; and a step of growing a second III-nitride crystal (20) onto a major surface (10m) of the first III-nitride crystal (10) by HVPE, in an ambient temperature higher than 1100° C.
Public/Granted literature
- US20100139553A1 Method of Growing III-Nitride Crystal Public/Granted day:2010-06-10
Information query
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