Invention Grant
- Patent Title: Micromechanical coriolis rate of rotation sensor
- Patent Title (中): 微机械科里奥利转速传感器
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Application No.: US13720217Application Date: 2012-12-19
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Publication No.: US09279681B2Publication Date: 2016-03-08
- Inventor: Alessandro Rocchi , Eleonora Marchetti , Lorenzo Bertini
- Applicant: Maxim Integrated Products, Inc.
- Applicant Address: US CA San Jose
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA San Jose
- Agency: North, Weber & Baugh LLP
- Priority: DE102011056971 20111223
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/04 ; G01C19/5712

Abstract:
A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.
Public/Granted literature
- US20130269469A1 MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR Public/Granted day:2013-10-17
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