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US09279824B2 Bulk acoustic wave accelerometers 有权
体积波加速度计

Bulk acoustic wave accelerometers
Abstract:
Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.
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