Invention Grant
- Patent Title: Acceleration sensor structure and use thereof
- Patent Title (中): 加速度传感器结构及其用途
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Application No.: US13739513Application Date: 2013-01-11
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Publication No.: US09279825B2Publication Date: 2016-03-08
- Inventor: Ville Pekka Rytkönen , Leif Roschier , Anssi Blomqvist
- Applicant: MURATA ELECTRONICS OY
- Applicant Address: FI Vantaa
- Assignee: MURATA ELECTRONICS OY
- Current Assignee: MURATA ELECTRONICS OY
- Current Assignee Address: FI Vantaa
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20125034 20120112
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/02 ; G01P15/18
Abstract:
A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.
Public/Granted literature
- US20130192371A1 ACCELERATOR SENSOR STRUCTURE AND USE THEREOF Public/Granted day:2013-08-01
Information query
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