An interference filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and opposed to the first optical film, at least one of the first and second optical films has a metal film having a reflecting property and a transmitting property with respect to light in a desired wavelength band, a surface and an edge portion of the metal film are covered by a barrier film, and the barrier film is formed of a material having conductivity.