Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13568501Application Date: 2012-08-07
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Publication No.: US09280047B2Publication Date: 2016-03-08
- Inventor: Yusuke Tanaka , Hirotoshi Torii
- Applicant: Yusuke Tanaka , Hirotoshi Torii
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. I.P. Division
- Priority: JP2011-175897 20110811
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
An imprint apparatus that molds an imprint material on a substrate using a mold, and forms a pattern on the substrate, the imprint apparatus includes a mold holding unit configured to hold the mold, which includes a surface including a pattern area, a substrate holding unit configured to hold the substrate, a first acquisition unit configured to acquire information concerning a difference in shape between the pattern area and a shot already formed on the substrate, and a control unit configured to control at least one of the mold holding unit and the substrate holding unit to adjust a spacing between the mold and the substrate, based on the information concerning the difference in shape acquired by the first acquisition unit, in a state where the pattern area and the imprint material are in contact with each other.
Public/Granted literature
- US20130037981A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2013-02-14
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