Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
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Application No.: US14261889Application Date: 2014-04-25
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Publication No.: US09280048B2Publication Date: 2016-03-08
- Inventor: Hiroshi Sato , Hideki Ina
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-068916 20100324
- Main IPC: B05D3/12
- IPC: B05D3/12 ; G03F7/00 ; B82Y10/00 ; B82Y40/00 ; B29C59/02

Abstract:
An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.
Public/Granted literature
- US20140234467A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2014-08-21
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