Invention Grant
US09281220B2 Liquid processing apparatus, liquid processing method and storage medium
有权
液体处理装置,液体处理方法和储存介质
- Patent Title: Liquid processing apparatus, liquid processing method and storage medium
- Patent Title (中): 液体处理装置,液体处理方法和储存介质
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Application No.: US13649263Application Date: 2012-10-11
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Publication No.: US09281220B2Publication Date: 2016-03-08
- Inventor: Yuuji Takimoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2011-225847 20111013
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
Disclosed are a liquid processing device, and a liquid processing method. The liquid processing method includes a first process that includes supplying a first processing liquid to the substrate and discharging the first processing liquid within the processing space from a first discharge path, a second process that includes supplying a second processing liquid to the substrate and discharging the second processing liquid within the processing space from the second discharge path, and after stop supplying of the first processing liquid and prior to beginning of the second process, a nozzle switching operation switching from the first nozzle to the second nozzle and a discharge mechanism switching operation switching from the first discharge path to the second discharge path are performed. A longer one of a time to switch the nozzle and a time to switch the discharge mechanism is determined as a maximum preparation time and the switching operations begin at an earlier time than the completion time of the first process by the maximum preparation time or more.
Public/Granted literature
- US20130092195A1 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIUM Public/Granted day:2013-04-18
Information query
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