- Patent Title: Non-contact magnetic drive assembly with mechanical stop elements
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Application No.: US13649703Application Date: 2012-10-11
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Publication No.: US09281231B2Publication Date: 2016-03-08
- Inventor: Cris Kroneberger , Bharatkumar Patel
- Applicant: Ferrotec (USA) Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Ferrotec (USA) Corporation
- Current Assignee: Ferrotec (USA) Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Mesmer & Deleault, PLLC
- Agent Robert R. Deleault, Esq.
- Main IPC: F16H1/28
- IPC: F16H1/28 ; H01L21/687 ; C23C14/50 ; H01L21/67 ; F16H57/08

Abstract:
A non-contact magnetic drive assembly with mechanical stop elements for a vacuum deposition system employing a lift-off process having a HULA configuration featuring a plurality of magnets coupled in an annular orientation to a central ring and an orbital ring, each magnet of the orbital ring becomes superposed with a magnet of the central ring as the orbital ring rotates, and a central drive component driving either the central ring, the orbital ring around the central ring or both simultaneously, the central drive component provides a rotational speed allowing non-contact, magnetic drive rotation of the orbital ring around the central ring until a difference between a magnetic drive torque of the superposed magnets and the rotational speed of the central drive component causes the superposed magnets to decouple enabling mechanical drive rotation by interactive contact between a plurality of central ring teeth and a plurality of orbital ring.
Public/Granted literature
- US20130095973A1 Non-contact magnetic drive assembly with mechanical stop elements Public/Granted day:2013-04-18
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