Invention Grant
- Patent Title: Memory structure and method for manufacturing the same
- Patent Title (中): 内存结构及其制造方法
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Application No.: US14636261Application Date: 2015-03-03
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Publication No.: US09281315B1Publication Date: 2016-03-08
- Inventor: Teng-Hao Yeh , Yen-Hao Shih , Chih-Wei Hu
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/105
- IPC: H01L27/105 ; H01L29/78 ; H01L29/417 ; H01L27/115 ; H01L23/528 ; H01L21/8239

Abstract:
A memory structure and a method for manufacturing the same are provided. The memory structure comprises a substrate, stacks, memory layers, a conductive material and conductive lines. The stacks are positioned on the substrate. The stacks are separated from each other by trenches. Each of the stacks comprises alternately stacked conductive stripes and insulating stripes. The memory layers conformally cover the stacks respectively. The conductive material is positioned in the trenches and on the stacks. The conductive material in the trenches forms one or more holes in each of the trenches. The conductive lines are positioned on the conductive material. Each of the conductive lines comprises a first portion and a second portion connected to each other, the first portion extends along a direction perpendicular to an extending direction of the stacks, and the second portion extends along the extending direction of the stacks.
Public/Granted literature
- US3083206A 2delta, 3-(5-nitro-2-furyl-5-(lower alkyl or phenyl)-1, 2, 4-oxadiazolines Public/Granted day:1963-03-26
Information query
IPC分类: