Invention Grant
US09281327B2 Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor
有权
图像传感器,成像装置以及用于制造图像传感器的装置和方法
- Patent Title: Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor
- Patent Title (中): 图像传感器,成像装置以及用于制造图像传感器的装置和方法
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Application No.: US13959106Application Date: 2013-08-05
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Publication No.: US09281327B2Publication Date: 2016-03-08
- Inventor: Takamasa Tanikuni , Shinpei Yamaguchi , Shuji Manda
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Hazuki International, LLC
- Priority: JP2012-175540 20120808; JP2013-109611 20130524
- Main IPC: H04N3/14
- IPC: H04N3/14 ; H01L27/146

Abstract:
There is provided an apparatus including an image sensor of a back-illuminated type using a complementary metal oxide semiconductor (CMOS), including a light receiving unit, formed in a semiconductor substrate, which receives incident light, an anti-reflection film formed on a back-surface side of the semiconductor substrate in which the light receiving unit is formed, and a silicon oxide film, formed on a back-surface side of the anti-reflection film, which has a refractive index lower than a silicon nitride film and has a higher density in a back-surface side than in a front-surface side thereof.
Public/Granted literature
- US20140043497A1 IMAGE SENSOR, IMAGING APPARATUS, AND APPARATUS AND METHOD FOR MANUFACTURING IMAGE SENSOR Public/Granted day:2014-02-13
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