Invention Grant
US09281327B2 Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor 有权
图像传感器,成像装置以及用于制造图像传感器的装置和方法

Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor
Abstract:
There is provided an apparatus including an image sensor of a back-illuminated type using a complementary metal oxide semiconductor (CMOS), including a light receiving unit, formed in a semiconductor substrate, which receives incident light, an anti-reflection film formed on a back-surface side of the semiconductor substrate in which the light receiving unit is formed, and a silicon oxide film, formed on a back-surface side of the anti-reflection film, which has a refractive index lower than a silicon nitride film and has a higher density in a back-surface side than in a front-surface side thereof.
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