Invention Grant
US09281355B2 Integrated thinfilm resistor and MIM capacitor with a low serial resistance
有权
集成薄膜电阻器和MIM电容器具有低串联电阻
- Patent Title: Integrated thinfilm resistor and MIM capacitor with a low serial resistance
- Patent Title (中): 集成薄膜电阻器和MIM电容器具有低串联电阻
-
Application No.: US14501277Application Date: 2014-09-30
-
Publication No.: US09281355B2Publication Date: 2016-03-08
- Inventor: Christoph Dirnecker
- Applicant: Texas Instruments Deutschland GMBH
- Applicant Address: DE Freising
- Assignee: TEXAS INSTRUMENTS DEUTSCHLAND GMBH
- Current Assignee: TEXAS INSTRUMENTS DEUTSCHLAND GMBH
- Current Assignee Address: DE Freising
- Agent Jacqueline J. Garner; Frank D. Cimino
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L21/311 ; H01L21/70 ; H01L49/02 ; H01L27/01 ; H01L23/522

Abstract:
An electronic device comprising a semiconductor structure having a back end capacitor and a back end thin film resistor and a method of manufacturing the same. The semiconductor structure includes a first dielectric layer, a bottom plate of the capacitor and a thin film resistor body. The bottom plate and the resistor body are laterally spaced apart portions of the same thin film layer. The bottom plate further includes a conductive layer overlying the thin film layer. A second dielectric layer is disposed on the conductive layer of the bottom plate of the capacitor. A top plate of the capacitor is disposed on the second dielectric layer.
Public/Granted literature
- US20150318340A1 INTEGRATED THINFILM RESISTOR AND MIM CAPACITOR WITH A LOW SERIAL RESISTANCE Public/Granted day:2015-11-05
Information query
IPC分类: