Invention Grant
US09281375B2 Methods of producing bipolar transistors having emitter-base junctions of varying depths and/or doping concentrations
有权
制造具有不同深度和/或掺杂浓度的发射极 - 基结的双极型晶体管的方法
- Patent Title: Methods of producing bipolar transistors having emitter-base junctions of varying depths and/or doping concentrations
- Patent Title (中): 制造具有不同深度和/或掺杂浓度的发射极 - 基结的双极型晶体管的方法
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Application No.: US14313114Application Date: 2014-06-24
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Publication No.: US09281375B2Publication Date: 2016-03-08
- Inventor: Xin Lin , Bernhard H. Grote , Jiang-Kai Zuo
- Applicant: Xin Lin , Bernhard H. Grote , Jiang-Kai Zuo
- Applicant Address: US TX Austin
- Assignee: FREESCALE SEMICONDUCTOR INC.
- Current Assignee: FREESCALE SEMICONDUCTOR INC.
- Current Assignee Address: US TX Austin
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L29/73 ; H01L29/66 ; H01L21/8222 ; H01L21/8249 ; H01L29/735 ; H01L29/70

Abstract:
Methods for producing bipolar transistors are provided. In one embodiment, the method includes producing a bipolar transistor including first and second connected emitter-base (EB) junctions of varying different depths. A buried layer (BL) collector is further produced to have a third depth greater than the depths of the EB junctions. The emitters and bases corresponding to the different EB junctions are provided during a chain implant. An isolation region may overlie the second EB junction location. The BL collector is laterally spaced from the first EB junction by a variable amount to facilitate adjustment of the transistor properties. The BL collector may or may not underlie at least a portion of the second EB junction. Regions of opposite conductivity type overlie and underlie the BL collector to preserve breakdown voltage. The transistor can be readily “tuned” by mask adjustments alone to meet various device requirements.
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