Invention Grant
- Patent Title: Forming strained and relaxed silicon and silicon germanium fins on the same wafer
-
Application No.: US14031118Application Date: 2013-09-19
-
Publication No.: US09281381B2Publication Date: 2016-03-08
- Inventor: Veeraraghavan S. Basker , Bruce Doris , Ali Khakifirooz , Tenko Yamashita , Chun-chen Yeh
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini & Bianco PL
- Agent Thomas Grzesik
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/84 ; H01L27/12

Abstract:
Various embodiments form strained and relaxed silicon and silicon germanium fins on a semiconductor wafer. In one embodiment a semiconductor wafer is formed. The semiconductor wafer comprises a substrate, a dielectric layer, and a strained silicon germanium (SiGe) layer. At least one region of the strained SiGe layer is transformed into a relaxed SiGe region. At least one strained SiGe fin is formed from a first strained SiGe region of the strained SiGe layer. At least one relaxed SiGe fin is formed from a first portion of the relaxed SiGe region. Relaxed silicon is epitaxially grown on a second strained SiGe region of the strained SiGe layer. Strained silicon is epitaxially grown on a second portion of the relaxed SiGe region. At least one relaxed silicon fin is formed from the relaxed silicon. At least one strained silicon fin is formed from the strained silicon.
Public/Granted literature
- US20140264602A1 FORMING STRAINED AND RELAXED SILICON AND SILICON GERMANIUM FINS ON THE SAME WAFER Public/Granted day:2014-09-18
Information query
IPC分类: