Invention Grant
- Patent Title: Ultraviolet blocking structure and method for semiconductor device
- Patent Title (中): 半导体器件的紫外线阻挡结构和方法
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Application No.: US12133689Application Date: 2008-06-05
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Publication No.: US09281384B2Publication Date: 2016-03-08
- Inventor: Naoki Takeguchi
- Applicant: Naoki Takeguchi
- Applicant Address: US CA San Jose
- Assignee: Cypress Semiconductor Corporation
- Current Assignee: Cypress Semiconductor Corporation
- Current Assignee Address: US CA San Jose
- Priority: JP2007-149794 20070605
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/02 ; H01L21/768 ; H01L29/792

Abstract:
Structures and methods for blocking ultraviolet rays during a film depositing process for semiconductor device are disclosed. In one embodiment, a semiconductor device includes an oxide-nitride-oxide (ONO) film formed on a semiconductor substrate, a gate electrode formed on the ONO film, a lower layer insulation film formed on the ONO film and the gate electrode, and a ultraviolet (UV) blocking layer based on a plurality of granular particles scattered in at least one insulation film formed on lower layer insulation film, where the UV blocking layer suppresses UV rays generated during an additional film deposition from reaching the ONO film.
Public/Granted literature
- US20090174041A1 ULTRAVIOLET BLOCKING STRUCTURE AND METHOD FOR SEMICONDUCTOR DEVICE Public/Granted day:2009-07-09
Information query
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