Invention Grant
US09281475B2 Resistive random-access memory (RRAM) with multi-layer device structure
有权
具有多层设备结构的电阻随机存取存储器(RRAM)
- Patent Title: Resistive random-access memory (RRAM) with multi-layer device structure
- Patent Title (中): 具有多层设备结构的电阻随机存取存储器(RRAM)
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Application No.: US14288657Application Date: 2014-05-28
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Publication No.: US09281475B2Publication Date: 2016-03-08
- Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Chih-Hung Pan , Ying-Lang Wang , Kei-Wei Chen , Shih-Chieh Chang , Te-Ming Kung
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: Jones Day
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A resistive memory cell is disclosed. The resistive memory cell comprises a pair of electrodes and a multi-layer resistance-switching network disposed between the pair of electrodes. The multi-layer resistance-switching network comprises a pair of carbon doping layers and a group-IV element doping layer disposed between the pair of carbon doping layers. Each carbon doping layer comprises silicon oxide doped with carbon. The group-IV doping layer comprises silicon oxide doped with a group-IV element. A method of fabricating a resistive memory cell is also disclosed. The method comprises forming a first carbon doping layer on a first electrode using sputtering, forming a group-IV element doping layer on the first carbon doping layer using sputtering, forming a second carbon doping layer on the group-IV element doping layer using sputtering, and forming a second electrode on the second carbon doping layer using sputtering.
Public/Granted literature
- US20150349250A1 RESISTIVE RANDOM-ACCESS MEMORY (RRAM) WITH MULTI-LAYER DEVICE STRUCTURE Public/Granted day:2015-12-03
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