Invention Grant
- Patent Title: Resistance change element and method for producing the same
- Patent Title (中): 电阻变化元件及其制造方法
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Application No.: US14125254Application Date: 2012-06-17
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Publication No.: US09281477B2Publication Date: 2016-03-08
- Inventor: Yutaka Nishioka , Kazumasa Horita , Natsuki Fukuda , Shin Kikuchi , Koukou Suu
- Applicant: Yutaka Nishioka , Kazumasa Horita , Natsuki Fukuda , Shin Kikuchi , Koukou Suu
- Applicant Address: JP Kanagawa
- Assignee: ULVAC, INC.
- Current Assignee: ULVAC, INC.
- Current Assignee Address: JP Kanagawa
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: JP2011-130011 20110610
- International Application: PCT/JP2012/003728 WO 20120617
- International Announcement: WO2012/169195 WO 20121213
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C11/56 ; G11C13/00

Abstract:
To provide a resistance change element which does not require a forming process and enables reduction of power consumption and miniaturization of the element, and to provide a method for producing it. A resistance change element 1 according to an embodiment of the present invention includes a bottom electrode layer 3, a top electrode layer 5 and an oxide semiconductor layer 4. The oxide semiconductor layer 4 has a first metal oxide layer 41 and a second metal oxide layer 42. The first metal oxide layer 41 is formed between the bottom electrode layer 3 and the top electrode layer 5, and in ohmic contact with the bottom electrode layer 3. The second metal oxide layer 42 is formed between the first metal oxide layer 41 and the top electrode layer 5, and in ohmic contact with the top electrode layer 5.
Public/Granted literature
- US20140166966A1 Resistance Change Element and Method for Producing the Same Public/Granted day:2014-06-19
Information query
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