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US09281484B2 Method for fabricating single electron transistor 有权
单电子晶体管制造方法

Method for fabricating single electron transistor
Abstract:
A transistor and a fabrication method thereof. A transistor includes a channel region including linkers, formed on a substrate, and a metallic nanoparticle grown from metal ions bonded to the linkers, a source region disposed at one end of the channel region, a drain region disposed at the other end of the channel region opposite of the source region, and a gate coupled to the channel region and serving to control migration of at least one charges in the channel region.
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