Invention Grant
- Patent Title: Antenna structure and plasma generating device
- Patent Title (中): 天线结构和等离子体发生装置
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Application No.: US13990840Application Date: 2011-09-16
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Publication No.: US09282624B2Publication Date: 2016-03-08
- Inventor: Yong Kwan Lee
- Applicant: Yong Kwan Lee
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- International Application: PCT/KR2011/006887 WO 20110916
- International Announcement: WO2013/039274 WO 20130321
- Main IPC: H01Q1/26
- IPC: H01Q1/26 ; H05H1/46 ; H01J37/32

Abstract:
An antenna structure includes four induction antennas which have the same structure, are connected in parallel and are disposed to be overlapped. The induction antennas include an external upper section arranged on a first quadrant of a first layer, an internal upper section connected to the external upper section and arranged on a second quadrant of the first layer, an internal lower section connected to the internal upper section and arranged on a third quadrant of a second layer arranged on a lower part of the first layer, and an external lower section connected to the internal lower section and arranged on a fourth quadrant of the second layer. An RF power is supplied to one end of the external upper section, and the other end of the external lower section is grounded.
Public/Granted literature
- US20130278136A1 ANTENNA STRUCTURE AND PLASMA GENERATING DEVICE Public/Granted day:2013-10-24
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