Invention Grant
- Patent Title: Integrated circuit switches, design structure and methods of fabricating the same
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Application No.: US14027939Application Date: 2013-09-16
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Publication No.: US09284185B2Publication Date: 2016-03-15
- Inventor: Felix P. Anderson , Thomas L. McDevitt , Anthony K. Stamper , Julio C. Costa , Jonathan H. Hammond
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00 ; G06F17/50 ; H01L21/302
Abstract:
Integrated MEMS switches, design structures and methods of fabricating such switches are provided. The method includes forming at least one tab of sacrificial material on a side of a switching device which is embedded in the sacrificial material. The method further includes stripping the sacrificial material through at least one opening formed on the at least one tab which is on the side of the switching device, and sealing the at least one opening with a capping material.
Public/Granted literature
- US20140017844A1 INTEGRATED CIRCUIT SWITCHES, DESIGN STRUCTURE AND METHODS OF FABRICATING THE SAME Public/Granted day:2014-01-16
Information query
