Invention Grant
- Patent Title: MEMS and method of manufacturing the same
- Patent Title (中): MEMS及其制造方法
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Application No.: US13413889Application Date: 2012-03-07
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Publication No.: US09287050B2Publication Date: 2016-03-15
- Inventor: Tomohiro Saito
- Applicant: Tomohiro Saito
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-054334 20110311
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01G5/18 ; B81C1/00
Abstract:
According to one embodiment, a MEMS includes a first electrode, a first auxiliary structure and a second electrode. The first electrode is provided on a substrate. The first auxiliary structure is provided on the substrate and adjacent to the first electrode. The first auxiliary structure is in an electrically floating state. The second electrode is provided above the first electrode and the first auxiliary structure, and is driven in a direction of the first electrode.
Public/Granted literature
- US20120228726A1 MEMS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-09-13
Information query
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