Invention Grant
- Patent Title: MEMS switches with reduced switching voltage and methods of manufacture
-
Application No.: US14670671Application Date: 2015-03-27
-
Publication No.: US09287075B2Publication Date: 2016-03-15
- Inventor: Stephen E. Luce , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01H51/22
- IPC: H01H51/22 ; H01H59/00 ; H01H11/00 ; H01H49/00 ; H01H1/58
Abstract:
MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
Public/Granted literature
- US20150200069A1 MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE Public/Granted day:2015-07-16
Information query
