Invention Grant
US09291817B2 Optical deflection device, apparatus including the same, and method of controlling optical deflecting device 有权
光学偏转装置,包括该偏转装置的装置以及光学偏转装置的控制方法

Optical deflection device, apparatus including the same, and method of controlling optical deflecting device
Abstract:
An optical deflecting device includes a mirror having a reflecting surface and a support unit to support the mirror. The support unit includes a first drive unit. The first drive unit includes a plurality of continuously meandering first beams and a plurality of first piezoelectric members respectively provided to the plurality of first beams to swing the mirror around a first axis to deflect light incident on the reflecting surface of the mirror. Two voltages having non-similar waveforms are respectively applied in parallel to each two of the first piezoelectric members respectively provided to adjacent two of the first beams.
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