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US09299534B2 Method and mechanism for erosion detection of defining apertures 有权
定义孔的侵蚀检测方法和机理

Method and mechanism for erosion detection of defining apertures
Abstract:
A defining aperture plate having at least two differently sized apertures is used in conjunction with at least two charge collectors. Because of the difference in aperture width, the two charge collectors receive different amounts of ions, where the amount is proportional to the associated aperture width. By monitoring the ratio of the charge collected by the first charge collector to the charge collected by the second collector, the amount of erosion can be monitored and optionally compensated for.
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