Invention Grant
- Patent Title: Field effect transistor and semiconductor device
- Patent Title (中): 场效应晶体管和半导体器件
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Application No.: US14432590Application Date: 2013-10-11
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Publication No.: US09299831B2Publication Date: 2016-03-29
- Inventor: Jun-ichi Matsuda
- Applicant: ASAHI KASEI MICRODEVICES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2012-228982 20121016; JP2013-136641 20130628
- International Application: PCT/JP2013/006103 WO 20131011
- International Announcement: WO2014/061254 WO 20140424
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/78 ; H01L29/06 ; H01L29/08 ; H01L29/10 ; H01L29/66

Abstract:
A field effect transistor and a semiconductor device are provided which enable a drain breakdown voltage in an off state and a drain breakdown voltage in an on state to be improved respectively. There are provided therein a field oxide film disposed on an N-type drift region positioned between a channel region of a silicon substrate and an N-type drain, an N-type drift layer disposed beneath the drift region of the silicon substrate and the drain, and an embedded layer higher in P-type impurity concentration than the silicon substrate. The embedded layer is disposed beneath the drift layer except for below at least a portion of the drain in the silicon substrate.
Public/Granted literature
- US20150295081A1 FIELD EFFECT TRANSISTOR AND SEMICONDUCTOR DEVICE Public/Granted day:2015-10-15
Information query
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