Invention Grant
- Patent Title: Spad photodiode of high quantum efficiency
- Patent Title (中): 高量子效率的Spad光电二极管
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Application No.: US14464898Application Date: 2014-08-21
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Publication No.: US09299865B2Publication Date: 2016-03-29
- Inventor: Michel Marty , Laurent Frey , Sebastien Jouan , Salim Boutami
- Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics SA , Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Crolles, Montrouge FR Paris
- Assignee: STMicroelectronics (Crolles 2) SAS; STMicroelectronics SA,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: STMicroelectronics (Crolles 2) SAS; STMicroelectronics SA,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Crolles, Montrouge FR Paris
- Agency: Gardere Wynne Sewell LLP
- Priority: EP1358139 20130823
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L31/062 ; H01L27/14 ; H01L31/107 ; H01L31/0352 ; G01T1/24 ; H01L31/0232 ; H01L27/146

Abstract:
A SPAD-type photodiode has a semiconductor substrate with a light-receiving surface. A lattice formed of interlaced strips made of a first material covers the light receiving surface. The lattice includes lattice openings with lateral walls covered by a spacer made of a second material. Then first and second materials have different optical indices, and further each optical index is less than or equal to the substrate optical index. A pitch of the lattice is of the order of a magnitude of an operating wavelength of the photodiode. The first and second materials are transparent at that operating wavelength. The lattice is made of a conductive material electrically coupled to an electrical connection node (for example, a bias voltage node).
Public/Granted literature
- US20150053924A1 SPAD PHOTODIODE OF HIGH QUANTUM EFFICIENCY Public/Granted day:2015-02-26
Information query
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