Invention Grant
- Patent Title: Resonator anchors and related apparatus and methods
- Patent Title (中): 谐振器锚点及相关装置和方法
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Application No.: US13896183Application Date: 2013-05-16
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Publication No.: US09299910B1Publication Date: 2016-03-29
- Inventor: Andrew Sparks , Florian Thalmayr , Jan H. Kuypers
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L41/053
- IPC: H01L41/053

Abstract:
Micromechanical resonators having stub anchors are described. The micromechanical resonators may be suspended, being connected to a substrate or support by one or more anchors. The anchor(s) may include one or more stubs which can impact the acoustic impedance of the anchor(s). The stub(s) may have various shapes and sizes. In some instances, multiple resonators may be coupled together by a connector having one or more stubs.
Information query
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