Invention Grant
US09299910B1 Resonator anchors and related apparatus and methods 有权
谐振器锚点及相关装置和方法

Resonator anchors and related apparatus and methods
Abstract:
Micromechanical resonators having stub anchors are described. The micromechanical resonators may be suspended, being connected to a substrate or support by one or more anchors. The anchor(s) may include one or more stubs which can impact the acoustic impedance of the anchor(s). The stub(s) may have various shapes and sizes. In some instances, multiple resonators may be coupled together by a connector having one or more stubs.
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