Invention Grant
- Patent Title: Piezoelectric thin-film multilayer body
- Patent Title (中): 压电薄膜多层体
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Application No.: US14223916Application Date: 2014-03-24
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Publication No.: US09299911B2Publication Date: 2016-03-29
- Inventor: Kazufumi Suenaga , Kenji Shibata , Kazutoshi Watanabe , Fumimasa Horikiri , Masaki Noguchi
- Applicant: Hitachi Metals, Ltd.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2013-061208 20130325
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/187
Abstract:
A piezoelectric thin-film multilayer body includes a substrate, an adhesive layer on the substrate, a lower electrode layer on the adhesive layer, and a lead-free piezoelectric thin-film layer on the lower electrode layer. The lead-free piezoelectric thin-film layer is composed of lithium potassium sodium niobate (composition formula (NaxKyLiz)NbO3, 0
Public/Granted literature
- US20140285069A1 PIEZOELECTRIC THIN-FILM MULTILAYER BODY Public/Granted day:2014-09-25
Information query
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