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US09302467B2 Laminated piezoelectric actuator for an ink-jet head 有权
用于喷墨头的层叠压电致动器

Laminated piezoelectric actuator for an ink-jet head
Abstract:
A method for manufacturing a piezoelectric actuator is disclosed that includes forming a vibration plate, forming a plurality of electrodes on the vibration plate, forming a piezoelectric layer on the electrodes, and forming a common electrode on the piezoelectric layer.
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