Invention Grant
- Patent Title: Micro-electro-mechanical-system device with guard ring and method for making same
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Application No.: US14670766Application Date: 2015-03-27
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Publication No.: US09302907B2Publication Date: 2016-04-05
- Inventor: Hsin Hui Hsu , Sheng Ta Lee , Chuan Wei Wang
- Applicant: Hsin Hui Hsu , Sheng Ta Lee , Chuan Wei Wang
- Applicant Address: TW Hsin-Chu
- Assignee: PIXART IMAGING INCORPORATION
- Current Assignee: PIXART IMAGING INCORPORATION
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: H01L41/113
- IPC: H01L41/113 ; B81C1/00 ; H01L41/047 ; H01L23/58
Abstract:
The present invention discloses a MEMS device with guard ring, and a method for making the MEMS device. The MEMS device comprises a bond pad and a sidewall surrounding and connecting with the bond pad, characterized in that the sidewall forms a guard ring by an etch-resistive material.
Public/Granted literature
- US20150197420A1 MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH GUARD RING AND METHOD FOR MAKING SAME Public/Granted day:2015-07-16
Information query
IPC分类:
