Invention Grant
- Patent Title: Electrochemical deposition apparatus with remote catholyte fluid management
- Patent Title (中): 电化学沉积装置采用远端阴极液管理
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Application No.: US14076610Application Date: 2013-11-11
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Publication No.: US09303329B2Publication Date: 2016-04-05
- Inventor: Arthur Keigler , David Guarnaccia , Demetrius Papapanayiotou , Jonathan Hander
- Applicant: TEL NEXX, Inc.
- Applicant Address: US MA Billerica
- Assignee: TEL NEXX, INC.
- Current Assignee: TEL NEXX, INC.
- Current Assignee Address: US MA Billerica
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: C25D21/10
- IPC: C25D21/10 ; C25D17/00 ; C25D7/12 ; C25D17/06 ; C25D17/10 ; C25D21/14 ; H01L21/288

Abstract:
Techniques disclosed herein include an electro-chemical deposition apparatus that provides an efficient circulation system, chemical management that provides reliable and uniform plating, and a configuration that provides short maintenance times and greater tool availability. Techniques include a processing tank containing an anolyte fluid, and one or more plating cells each having a catholyte fluid compartment with a circulation path that connects to a separate or remote catholyte reservoir. Thus, with such a configuration, a single pump can be used to flow catholyte (via manifolds) through one or more plating cells. Thus, with the catholyte reservoir maintained off board, instead of dumping catholyte over a weir into a reservoir, catholyte fluid—after flowing through a plating cell—is returned to the catholyte reservoir.
Public/Granted literature
- US20150129418A1 ELECTROCHEMICAL DEPOSITION APPARATUS WITH REMOTE CATHOLYTE FLUID MANAGEMENT Public/Granted day:2015-05-14
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