Invention Grant
- Patent Title: Heater assembly for crystal growth apparatus
- Patent Title (中): 晶体生长装置加热器组件
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Application No.: US13489675Application Date: 2012-06-06
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Publication No.: US09303331B2Publication Date: 2016-04-05
- Inventor: Carl Chartier , Parthasarathy Santhanaraghavan , Andriy Andrukhiv , Dave Lackey , Bhuvaragasamy G. Ravi
- Applicant: Carl Chartier , Parthasarathy Santhanaraghavan , Andriy Andrukhiv , Dave Lackey , Bhuvaragasamy G. Ravi
- Assignee: GTAT Corporation
- Current Assignee: GTAT Corporation
- Agency: Parker Ibrahim & Berg LLC
- Agent Stephen D. LeBarron
- Main IPC: F27D11/00
- IPC: F27D11/00 ; C30B11/00 ; C30B35/00 ; C30B15/14 ; F27B14/14 ; F27D11/02 ; F27D99/00

Abstract:
Systems and methods are provided to promote uniform thermal environment to feedstock material (e.g., silicon) in a crucible of a crystal growth apparatus are provided herein. More specifically, a heating system may be arranged in the crystal growth apparatus so as to include at least a first and second heating element which are configured to distribute heat axisymmetrically to the feedstock material and the second heating element that is configured to distribute heat symmetrically to the feedstock material to thereby provide uniform heat distribution to the feedstock material in the crucible to allow for increased consistency in crystal ingot quality.
Public/Granted literature
- US20120312800A1 HEATER ASSEMBLY FOR CRYSTAL GROWTH APPARATUS Public/Granted day:2012-12-13
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