Invention Grant
- Patent Title: Angular velocity sensor
- Patent Title (中): 角速度传感器
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Application No.: US13989644Application Date: 2011-12-22
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Publication No.: US09303993B2Publication Date: 2016-04-05
- Inventor: Tsuyoshi Fujii , Kensaku Yamamoto
- Applicant: Tsuyoshi Fujii , Kensaku Yamamoto
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2010-291931 20101228
- International Application: PCT/JP2011/007190 WO 20111222
- International Announcement: WO2012/090452 WO 20120705
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/574 ; G01C19/5607 ; G01C19/5719 ; H01L41/113

Abstract:
An angular velocity sensor includes a sensor element having a shape defined in an XYZ space, and can detect an angular velocity about a Z axis. The sensor element includes a support body extending in a direction of an X axis, an arm connected with the support body, and a weight connected with the arm. The arm has a first end connected with the support body and a second end connected with the weight. The arm has substantially a J-shape including a first arm portion extending in a direction of a Y axis from the first end to a first corner, a second arm portion extending in the direction of the X axis from the first corner to a second corner, and a third arm portion extending in the direction of the Y axis from the second corner to the second end. The length of the arm in the direction of the X axis is larger than the length of the weight in the direction of the X axis. This angular velocity sensor can improve the sensibility to angular velocity about the Z axis.
Public/Granted literature
- US20130239681A1 ANGULAR VELOCITY SENSOR Public/Granted day:2013-09-19
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