Invention Grant
US09304092B2 Apparatus for examining test bodies 有权
用于检查试验体的装置

Apparatus for examining test bodies
Abstract:
The invention relates to an apparatus (1) for examining test bodies (P), in particular electronic subassemblies and electronic devices, comprising at least one radiation source (2) for X-raying at least one test body (P), at least one detection unit (3) for detecting radiation (S) emitted by means of the radiation source (2), at least one holding element (4) for holding the at least one test body (P) and for positioning the latter between the radiation source (2) and the detection unit (3), and a movement unit (5), coupled to the holding element (4), for moving the holding element (4), wherein the movement unit (5) is constructed as a parallel-mechanism movement unit.
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