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US09304146B2 Radio-frequency reflectometry scanning tunneling microscope 有权
射频反射扫描隧道显微镜

Radio-frequency reflectometry scanning tunneling microscope
Abstract:
An RF reflectometry scanning tunneling microscope is suitable for observing a surface of an object, and includes a probe that cooperates with the object to form a tunneling resistor therebetween, an RF resonant circuit that cooperates with the tunneling resistor to form a LCR resonant circuit including an inductor connected to a parallel connection of a capacitor, a resistor and the tunneling resistor, a directional coupler receiving an RF signal and outputting the RF signal to the LCR resonant circuit, and an RF signal measuring device that generates a scanning result associated with the surface of the object based on a reflected RF signal resulting from reflection of the RF signal by the LCR resonant circuit.
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