Invention Grant
- Patent Title: Magnetoresistive sensor device and method of fabricating such magnetoresistive sensor device
- Patent Title (中): 磁阻传感器装置及其制造方法
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Application No.: US12278981Application Date: 2007-02-13
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Publication No.: US09304175B2Publication Date: 2016-04-05
- Inventor: Arne Kraemer , Reinhard Buchhold
- Applicant: Arne Kraemer , Reinhard Buchhold
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Agent Rajeev Madnawat
- Priority: EP06110312 20060223
- International Application: PCT/IB2007/050466 WO 20070213
- International Announcement: WO2007/096806 WO 20070830
- Main IPC: G01R33/09
- IPC: G01R33/09 ; H01L21/00 ; B82Y25/00

Abstract:
In order to further develop a magnetoresistive sensor device (100; 100′; 100″) comprising at least one substrate or wafer (10), in particular at least one silicon wafer, and at least one sensing element (30), in particular at least one A[nisotropic]M[agneto]R[esistive] sensing element and/or—at least one G[iant]M[agneto]R[esistive] sensing element, for example at least one multilayer G[iant]M[agneto]R[esistive] sensing element, said sensing element (30) being arranged on and/or under the substrate or wafer (10), as well as a corresponding method of fabricating such magnetoresistive sensor device (100; 100′; 100″) in such way that an external or extra bias magnetic field to preset the sensing element (10) and/or the magnetoresistive sensor device (100; 100′; 100″) can be dispensed with, it is proposed to arrange at least one magnetic layer (20t, 20b) on (20t) and/or under (20b) the substrate or wafer (10) and at least partially on (20t) and/or under (20b) the sensing element (30), said magnetic layer (20t, 20b) providing at least one bias magnetic field.
Public/Granted literature
- US20090058413A1 MAGNETORESISTIVE SENSOR DEVICE AND METHOD OF FABRICATING SUCH MAGNETORESISTIVE SENSOR DEVICE Public/Granted day:2009-03-05
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