Invention Grant

  • Patent Title: Magnetoresistive sensor device and method of fabricating such magnetoresistive sensor device
  • Patent Title (中): 磁阻传感器装置及其制造方法
  • Application No.: US12278981
    Application Date: 2007-02-13
  • Publication No.: US09304175B2
    Publication Date: 2016-04-05
  • Inventor: Arne KraemerReinhard Buchhold
  • Applicant: Arne KraemerReinhard Buchhold
  • Applicant Address: NL Eindhoven
  • Assignee: NXP B.V.
  • Current Assignee: NXP B.V.
  • Current Assignee Address: NL Eindhoven
  • Agent Rajeev Madnawat
  • Priority: EP06110312 20060223
  • International Application: PCT/IB2007/050466 WO 20070213
  • International Announcement: WO2007/096806 WO 20070830
  • Main IPC: G01R33/09
  • IPC: G01R33/09 H01L21/00 B82Y25/00
Magnetoresistive sensor device and method of fabricating such magnetoresistive sensor device
Abstract:
In order to further develop a magnetoresistive sensor device (100; 100′; 100″) comprising at least one substrate or wafer (10), in particular at least one silicon wafer, and at least one sensing element (30), in particular at least one A[nisotropic]M[agneto]R[esistive] sensing element and/or—at least one G[iant]M[agneto]R[esistive] sensing element, for example at least one multilayer G[iant]M[agneto]R[esistive] sensing element, said sensing element (30) being arranged on and/or under the substrate or wafer (10), as well as a corresponding method of fabricating such magnetoresistive sensor device (100; 100′; 100″) in such way that an external or extra bias magnetic field to preset the sensing element (10) and/or the magnetoresistive sensor device (100; 100′; 100″) can be dispensed with, it is proposed to arrange at least one magnetic layer (20t, 20b) on (20t) and/or under (20b) the substrate or wafer (10) and at least partially on (20t) and/or under (20b) the sensing element (30), said magnetic layer (20t, 20b) providing at least one bias magnetic field.
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