Invention Grant
US09304176B2 Thin-film magnetic sensor including a GMR film and method for manufacturing the same 有权
包括GMR薄膜的薄膜磁传感器及其制造方法

Thin-film magnetic sensor including a GMR film and method for manufacturing the same
Abstract:
The present invention provides a thin-film magnetic sensor including: a giant magnetoresistive film having a giant magnetoresistive effect, and thin-film yokes each composed of a soft magnetic material and electrically connected to both ends of the giant magnetoresistive film, in which each of the thin-film yokes includes an outer yoke which is composed of a first soft magnetic material and is provided outward with respect to the giant magnetoresistive film and an inner yoke which is composed of a second soft magnetic material and is provided between the giant magnetoresistive film and the outer yoke; the first soft magnetic material is composed of a crystalline or microcrystalline soft magnetic material; the thin-film magnetic sensor is obtained by (1) forming the each outer yoke, the giant magnetoresistive film and the each inner yoke in this order, and (2) performing a heat treatment for improving soft magnetic characteristics of the each outer yoke before forming the giant magnetoresistive film; and a length L2 of the each inner yoke satisfies the following equation (a) and equation (b): L2/t1≧1  (a) L2×100/(L1+L2)≦50  (b) where t1 is a thickness of the each outer yoke, and L1 is a length of the each outer yoke.
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