Invention Grant
- Patent Title: Integrated LDMOS devices for silicon photonics
- Patent Title (中): 用于硅光子学的集成LDMOS器件
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Application No.: US14332886Application Date: 2014-07-16
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Publication No.: US09304335B2Publication Date: 2016-04-05
- Inventor: John J. Ellis-Monaghan , William M. Green , Michael J. Hauser , Edward W. Kiewra , Xuefeng Liu , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Michael Le Strange; Andrew M. Calderon
- Main IPC: H01L21/782
- IPC: H01L21/782 ; H01L27/14 ; H01L29/78 ; G02F1/025 ; H01L29/10 ; H01L29/08 ; H01L29/423 ; H01L29/40 ; H01L29/06 ; H01L29/49 ; H01L27/088 ; H01L21/306 ; H01L29/66 ; H01L27/06 ; G02B6/136 ; G02B6/12
Abstract:
A device includes a laterally diffused metal-oxide-semiconductor (LDMOS) device integrated with an optical modulator. An optical waveguide of the optical modulator includes a silicon-containing structure in a drift region of the LDMOS device.
Public/Granted literature
- US20160018677A1 INTEGRATED LDMOS DEVICES FOR SILICON PHOTONICS Public/Granted day:2016-01-21
Information query
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