Photoalignment equipment and photoalignment method
Abstract:
A photoalignment equipment includes a light emitting device, a platform, a pipe assembly, and a blower. The light emitting device has an ultraviolet light source and an accommodating space. The ultraviolet light source is located in the accommodating space. When the ultraviolet light source emits an ultraviolet light, at least a portion of air in the accommodating space is transformed into a plurality of ozone molecules. The platform is under the light-emitting device. The pipe assembly has a first opening and at least one second opening. The first opening is communicated with the accommodating space, and the second opening faces the platform. The blower is communicated with the pipe assembly to draw the ozone molecules in the accommodating space by the first opening of the pipe assembly and exhausts the ozone molecules from the second opening of the pipe assembly.
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