Invention Grant
- Patent Title: Arrangement for actuating an element in a microlithographic projection exposure apparatus
- Patent Title (中): 用于在微光刻投影曝光设备中致动元件的布置
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Application No.: US14059296Application Date: 2013-10-21
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Publication No.: US09304404B2Publication Date: 2016-04-05
- Inventor: Juergen Fischer , Ulrich Schoenhoff , Bernhard Geuppert , Hans Butler , Robertus Johannes Marinus De Jongh
- Applicant: Carl Zeiss SMT GmbH , ASML Netherlands B.V.
- Applicant Address: DE Oberkochen NL Veldhoven
- Assignee: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- Current Assignee: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- Current Assignee Address: DE Oberkochen NL Veldhoven
- Agency: Walter Ottesen P.A.
- Priority: DE102011007917 20110421
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03F7/20

Abstract:
An arrangement actuates an element in a microlithographic projection exposure apparatus. The arrangement includes first and second actuators and first and second mechanical couplings. The first and second actuators are coupled to the element via corresponding ones of the first and second mechanical couplings for applying respective forces to the element which is regulatable in at least one degree of freedom. The first and second actuators have first and second actuator masses, respectively, and the first actuator mass and the first mechanical coupling conjointly define a first mass-spring system operating as a first low-pass filter. The second actuator mass and the second mechanical coupling conjointly define a second mass-spring system operating as a second low-pass filter. The first and second mass-spring systems have first and second natural frequencies deviating from each other by a maximum deviation equal to 10% of the largest of the first and second natural frequencies.
Public/Granted literature
- US20140043596A1 ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2014-02-13
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