Invention Grant
- Patent Title: Cu alloy film for display device and display device
- Patent Title (中): Cu合金薄膜用于显示装置和显示装置
-
Application No.: US13810949Application Date: 2011-07-21
-
Publication No.: US09305470B2Publication Date: 2016-04-05
- Inventor: Aya Miki , Toshihiro Kugimiya , Yasuaki Terao
- Applicant: Aya Miki , Toshihiro Kugimiya , Yasuaki Terao
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-164385 20100721
- International Application: PCT/JP2011/066614 WO 20110721
- International Announcement: WO2012/011539 WO 20120126
- Main IPC: B32B17/06
- IPC: B32B17/06 ; B32B15/04 ; G09F9/30 ; C22C9/00 ; C22C9/01 ; C22C9/04 ; C22C9/05 ; C22C9/06 ; C22F1/08 ; H01L21/285 ; H01L21/3205 ; H01L23/532 ; H01L29/45 ; H01L29/49 ; G02F1/1362 ; C23C28/00 ; H01L27/12 ; C23C14/18 ; H01L27/32 ; H01L29/786

Abstract:
The present invention provides a display device which is provided with a Cu alloy film having high adhesion to an oxygen-containing insulator layer and a low electrical resistivity. The present invention relates to a Cu alloy film for a display device, said film having a stacked structure including a first layer (Y) composed of a Cu alloy containing, in total, 1.2-20 atm % of at least one element selected from among a group composed of Zn, Ni, Ti, Al, Mg, Ca, W, Nb and Mn, and a second layer (X) composed of pure Cu or a Cu alloy having Cu as a main component and an electrical resistivity lower than that of the first layer (Y). A part of or the whole first layer (Y) is directly in contact with an oxygen-containing insulator layer (27), and in the case where the first layer (Y) contains Zn or Ni, the thickness of the first layer (Y) is 10-100 nm, and in the case where the first layer (Y) does not contain Zn and Ni, the thickness of the first layer (Y) is 12-100 nm. The present invention also relates to a display device having the Cu alloy film.
Public/Granted literature
- US20130122323A1 Cu ALLOY FILM FOR DISPLAY DEVICE AND DISPLAY DEVICE Public/Granted day:2013-05-16
Information query