Invention Grant
US09305641B2 Resistance change memory and forming method of the resistance change device
有权
电阻变化记忆和电阻变化装置的形成方法
- Patent Title: Resistance change memory and forming method of the resistance change device
- Patent Title (中): 电阻变化记忆和电阻变化装置的形成方法
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Application No.: US13905951Application Date: 2013-05-30
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Publication No.: US09305641B2Publication Date: 2016-04-05
- Inventor: Tomonori Sakaguchi , Masayuki Terai , Koichi Yako
- Applicant: RENESAS ELECTRONICS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-137826 20120619
- Main IPC: G11C11/00
- IPC: G11C11/00 ; G11C13/00 ; H01L45/00

Abstract:
A resistance change memory has a resistance change device and a control circuit for controlling application of voltage to the resistance change device. The resistance change device has a first electrode, a second electrode, and a resistance change layer interposed between the first electrode and the second electrode. A material for the second electrode includes one of members selected from the group consisting of W, Ti, Ta, and nitrides thereof. During forming of the resistance change device, the control circuit performs a second forming treatment succeeding to a first forming treatment. The first forming treatment includes application of voltage such that the potential of the first electrode is higher than the potential of the second electrode. The second forming treatment includes application of voltage such that the potential of the second electrode is higher than the potential of the first electrode.
Public/Granted literature
- US20130336043A1 RESISTANCE CHANGE MEMORY AND FORMING METHOD OF THE RESISTANCE CHANGE DEVICE Public/Granted day:2013-12-19
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