Invention Grant
- Patent Title: Data path for lithography apparatus
- Patent Title (中): 光刻设备的数据路径
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Application No.: US13290139Application Date: 2011-11-07
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Publication No.: US09305747B2Publication Date: 2016-04-05
- Inventor: Marco Jan-Jaco Wieland , Teunis Van De Peut , Floris Pepijn Van Der Wilt , Ernst Habekotte
- Applicant: Marco Jan-Jaco Wieland , Teunis Van De Peut , Floris Pepijn Van Der Wilt , Ernst Habekotte
- Applicant Address: NL Delft
- Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee Address: NL Delft
- Agency: Hoyng Rokh Monegier LLP
- Agent David P. Owen
- Main IPC: H01J37/317
- IPC: H01J37/317 ; B82Y10/00 ; B82Y40/00

Abstract:
The invention relates to a maskless lithography system for patterning a target using a plurality of charged particle beamlets. The system comprises an electron optical column including a blanker array for modulating the beamlets. The blanker array includes receivers for receiving data signals and blanker elements for modulating the beamlets in accordance with the data signals. The system further comprises a data path comprising a preprocessing system for processing pattern data and a plurality of transmission channels for transmitting processed pattern data to the blanker elements. The data path further comprises a pattern streaming system for receiving pattern data and generating data signals. First and second channel selectors connect a subset of selected transmission channels for pattern data transmission. The first channel selector is connected between the preprocessing system and the transmission channels. The second channel selector is connected between the channels and the blanker elements.
Public/Granted literature
- US20120287410A1 DATA PATH FOR LITHOGRAPHY APPARATUS Public/Granted day:2012-11-15
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