Invention Grant
US09305767B2 Liquid processing apparatus, liquid processing method and storage medium
有权
液体处理装置,液体处理方法和储存介质
- Patent Title: Liquid processing apparatus, liquid processing method and storage medium
- Patent Title (中): 液体处理装置,液体处理方法和储存介质
-
Application No.: US13417388Application Date: 2012-03-12
-
Publication No.: US09305767B2Publication Date: 2016-04-05
- Inventor: Kenji Nishi , Kazuhiro Takeshita , Nobuhiro Ogata , Satoru Tanaka , Shogo Mizota
- Applicant: Kenji Nishi , Kazuhiro Takeshita , Nobuhiro Ogata , Satoru Tanaka , Shogo Mizota
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2011-058240 20110316
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67

Abstract:
There is provided a liquid processing apparatus including a rotation unit configured to hold the target substrate and rotate the target substrate around a vertical axis; a processing solution supply nozzle configured to supply the processing solution to the surface of the target substrate being rotated; a first gas supply unit configured to form a downward flow of a first gas that flows over the entire surface of the target substrate and is introduced into a cup in order to form a processing atmosphere suitable for a liquid process to be performed; and a second gas supply unit configured to form a downward flow of a second gas different from the first gas in a region outside the downward flow of the first gas. The first gas supply unit and the second gas supply unit are provided at a ceiling portion of the housing serving as the processing space.
Public/Granted literature
- US20120234356A1 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIUM Public/Granted day:2012-09-20
Information query
IPC分类: