Invention Grant
US09305777B2 Catalyst free synthesis of vertically aligned CNTs on SiNW arrays
有权
在SiNW阵列上无催化剂合成垂直排列的CNT
- Patent Title: Catalyst free synthesis of vertically aligned CNTs on SiNW arrays
- Patent Title (中): 在SiNW阵列上无催化剂合成垂直排列的CNT
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Application No.: US14008847Application Date: 2012-03-30
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Publication No.: US09305777B2Publication Date: 2016-04-05
- Inventor: Manjusha Vilas Shelke
- Applicant: Manjusha Vilas Shelke
- Applicant Address: IN New Delhi
- Assignee: Council of Scientific and Industrial Research
- Current Assignee: Council of Scientific and Industrial Research
- Current Assignee Address: IN New Delhi
- Agency: Ohlandt Greeley Ruggiero & Perle L.L.P.
- Priority: IN0918/DEL/2011 20110331
- International Application: PCT/IB2012/051546 WO 20120330
- International Announcement: WO2012/131630 WO 20121004
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/02 ; B82Y10/00 ; C01B31/02 ; C30B25/00 ; C30B29/06 ; C30B29/60 ; H01L29/06 ; B82Y30/00 ; B82Y40/00 ; H01L51/00 ; H01L51/05
Abstract:
The present invention discloses novel one dimensional, direct nano-heterojunctions of vertically aligned silicon nanowires (SiNW)-carbon nano tube (CNT) arrays with ultra-low turn-on field useful in single electronic devices. The invention further discloses catalyst free chemical vapor deposition (CVD) route for synthesis of one dimensional, direct nano-heterojunctions of vertically aligned SiNW-CNT arrays.
Public/Granted literature
- US20140183450A1 CATALYST FREE SYNTHESIS OF VERTICALLY ALIGNED CNTs ON SiNW ARRAYS Public/Granted day:2014-07-03
Information query
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