Invention Grant
- Patent Title: Nanometric imprint lithography method
- Patent Title (中): 纳米压印光刻法
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Application No.: US13997002Application Date: 2011-12-21
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Publication No.: US09305783B2Publication Date: 2016-04-05
- Inventor: Sebastien Pauliac
- Applicant: Sebastien Pauliac
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1061018 20101222
- International Application: PCT/EP2011/073705 WO 20111221
- International Announcement: WO2012/085164 WO 20120628
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01L21/033 ; B82Y10/00 ; B82Y40/00

Abstract:
A nanoimprint lithography method, including: pressing a mold in a photosensitive resin to form at least one imprint pattern defined by a stamped area and an adjacent area, the adjacent area being less stamped or not stamped at all, and being thicker than the stamped area; and exposure to a certain amount of sunlight. Respective thicknesses of the two areas are defined such that the two areas absorb a different amount of the sunlight and the amount of sunlight provided by the exposure is predetermined so as to be great enough to activate the resin in whichever of the two areas has the greater absorption, and so as not to be great enough to activate the other of the two areas.
Public/Granted literature
- US20140004313A1 NANOMETRIC IMPRINT LITHOGRAPHY METHOD Public/Granted day:2014-01-02
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