Invention Grant
- Patent Title: Fabrication method for microelectronic components and microchip inks used in electrostatic assembly
- Patent Title (中): 用于静电组装的微电子元件和微芯片油墨的制造方法
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Application No.: US14192456Application Date: 2014-02-27
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Publication No.: US09305807B2Publication Date: 2016-04-05
- Inventor: Gregory L. Whiting , Rene A. Lujan , Eugene M. Chow , JengPing Lu
- Applicant: Palo Alto Research Center Incorporated
- Applicant Address: US CA Palo Alto
- Assignee: Palo Alto Research Center Incorporated
- Current Assignee: Palo Alto Research Center Incorporated
- Current Assignee Address: US CA Palo Alto
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461 ; H01L21/48 ; H01L21/78 ; H01L23/00 ; H01L21/67

Abstract:
Charge-encoded chiplets are produced using a sacrificial metal mask and associated fabrication techniques and materials that are compatible with typical semiconductor fabrication processes to provide each chiplet with two different (i.e., positive and negative) charge polarity regions generated by associated patterned charge-inducing material structures. A first charge-inducing material having a positive charge polarity is formed on a silicon wafer over previously-fabricated integrated circuits, then a sacrificial metal mask is patterned only over a portion of the charge-inducing material structure, and a second charge-inducing material structure (e.g., a self-assembling octadecyltrichlorosilane monolayer) is deposited having a negative charge polarity. The sacrificial metal mask is then removed to expose the masked portion of the first charge-inducing material structure, thereby providing the chiplet with both a positive charge polarity region and a negative charge polarity region.
Public/Granted literature
- US20150243528A1 Fabrication Method For Microelectronic Components And Microchip Inks Used In Electrostatic Assembly Public/Granted day:2015-08-27
Information query
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