Invention Grant
- Patent Title: Apparatus and method for manufacturing an integrated circuit
- Patent Title (中): 用于制造集成电路的装置和方法
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Application No.: US14222888Application Date: 2014-03-24
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Publication No.: US09305821B2Publication Date: 2016-04-05
- Inventor: Willem-jan A. De Wijs , Marcus Johannes Van De Sande
- Applicant: KONINKLIJKE PHILIPS N.V.
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips N.V.
- Current Assignee: Koninklijke Philips N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP09156417 20090327
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L21/28 ; B05C9/14 ; H05K3/12 ; H05K3/10 ; H01L31/0224

Abstract:
An apparatus for manufacturing an integrated circuit having a thick film metal layer includes an applicator configured to selectively apply a paste on a heat-conducting substrate. The paste includes particles of a first metal constituent of particles having sizes substantially within a narrow predetermined range about a predetermined size. The apparatus further includes a radio frequency (RF) generator to selectively inductively coupling RF energy into the paste. The first metal particles of the predetermined size are inductively couplable with the RF energy, and the frequency of the RF energy corresponds to a coupling frequency of the first metal particles of the predetermined size so that the inductive heating of the first metal particles is substantially maximized.
Public/Granted literature
- US20140206150A1 APPARATUS AND METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT Public/Granted day:2014-07-24
Information query
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