A method including forming a trench over a layer disposed on a semiconductor substrate. The trench is filled with a first material to form a filled trench. A feature of a second material is formed over the filled trench. The feature is disposed over the filled trench and extends along two opposing sidewalls of the filled trench to a top surface of the layer. The feature is then planarized to expose a top surface of the filled trench and provide a first portion of the feature adjacent a first sidewall of the two opposing sidewalls of the filled trench and a second portion of the feature adjacent a second sidewall of the two opposing sidewalls of the filled trench. The first and second portions of the feature are used to define a dimension of an interconnect feature disposed over the semiconductor substrate.