Invention Grant
- Patent Title: Integrated circuits having crack-stop structures and methods for fabricating the same
- Patent Title (中): 具有断裂结构的集成电路及其制造方法
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Application No.: US14132368Application Date: 2013-12-18
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Publication No.: US09305886B2Publication Date: 2016-04-05
- Inventor: Wei Shao , Fan Zhang , Juan Boon Tan
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L23/00 ; H01L21/768 ; H01L21/311 ; H01L23/522 ; H01L21/263

Abstract:
Integrated circuits and methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes fabricating a crack-stop structure that extends through a plurality of metallization layers above a semiconductor substrate. The plurality of metallization layers includes a first metallization layer and a second metallization layer that overlies the first metallization layer. Fabricating the crack-stop structure includes forming a first via-bar overlying and coupled to a first metal line of the first metallization layer that is disposed in a first ILD layer of dielectric material. The first via-bar is disposed in a second ILD layer of dielectric material and has a first width. A second metal line of the second metallization layer that is in the second ILD layer is formed overlying and coupled to the first via-bar. The second metal line has a second width that is from about 1 to about 5 times the first width.
Public/Granted literature
- US20150171025A1 INTEGRATED CIRCUITS HAVING CRACK-STOP STRUCTURES AND METHODS FOR FABRICATING THE SAME Public/Granted day:2015-06-18
Information query
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